Superprecision technology uses the crucial technology of the domain

The 2nd thalassic war that a large number of use of weapon of 1 accurate control and guide and exceeds what apparent distance atttacks ability to rise to just end and war of first time bay, Kosovo and Afghan war photograph are compared, the scale that uses bomb of accurate control and guide already from 6.

8% , 34% , the 66% immediateness that rise to this 100% , means of control and guide also by inertial control and guide (INS) matchs extreme control and guide and system of global satellite location to picture of laser control and guide, number (means of GPS) control and guide develops, a lot of laser cell that in using the widest laser control and guide among them, use if housing of top of laser illuminator, laser, blame is spherical lens ask very tall precision and exterior quality, these component will affect precision of control and guide directly. What picture of the plane of the high accuracy tall reflectivity of laser illuminator, number matchs extreme control and guide to need to use is infra-red explore reach accept, infra-red into picture (tellurium cadmium is mercuric) the fast face quality that waits for a requirement is planar, can undertake through exceeding accurate and abrade ability high quality batch is produced only, spherical illuminator and lens can use and rather than CNC exceeds accurate turning, grinding and polish to be made. Airborne radar is the key that apparent distance charge exceeds in sky, among them the production technology of conduit of wave of microwave parts of an apparatus has main effect to radar function, the quality factor of wave conduit and its surface surface roughness, precision is concerned, with exceed accurate turning technology to be able to assure a requirement easily, assure the function of radar finally thereby. 1.

Of ability of 2 night fighting the main measure that raising night fighting is prospective war air attack, it can make a lot of groovy weapon be no longer in force that do not suffer an electron to disturb and use optics to aim at a system, reduce charge thereby square casualties. Telemeter of infra-red detector, laser, crepuscular night is inspected before can be being used in night fighting and grating TV see the ground is become clearly picture. Night inspects the use of equipment to include the helicopter, car that hold clip, missile, personnel to wait. Because desert climate is burning hot, to facilitate evening fights, the United States in this thalassic war deployed the night of high definition to inspect facility for every soldier, and reduce greatly with quantity of proportion of photograph of before a few wars (400g) , can secure directly go up in helmet, increased the flexibility that the soldier fights thereby. In afore-mentioned device, infra-red into resembling is crucial technology, among them the exterior quality with very high demand of mercuric crystal of cadmium of crucial element tellurium (low surface roughness, without nick, without degenerative layer) , need is used exceed nicety specially abrade (if be not a contact,abrade, mechanization learns abrade etc) treatment. Night is inspected used likewise in equipment be not optics of spherical curved surface yuan component. 1.

The progress of technology of 3 electrons antagonism warlike U.S. Army used the 2nd bay to the electron is disturbed and turned over radiation missile to squelch in great quantities Yi Jun's communication and radar, make Yi Jun lost the ability such as direct, early-warning thoroughly, because each district garrison lost the connection with headquarters, can be battle severally only, the U.S. Army's progress is unusually so great. This square electron equipment in electronic antagonism must have wonderful interference rejection ability and quick response capacity, the circuit of large scale integration that uses arsenic to change gallium semiconductor to be made and traditional semiconductor silicon photograph are compared, have rate fast, job is reliable, fight radiant energy force to wait for a characteristic by force. Arsenic changes the production of gallium semiconductor device to need one a complete set of to exceed craft of accurate grinding, abrade, polish and score substandard to delay installation. In addition, the score of circuit of large scale integration of American for military use must want to have superprecision of one a complete set of and imperceptible treatment facilities. 1.

The evolution of system of satellite of 4 for military use appears acting war to cannot have left all sorts of satellites, if investigate,wait with the satellitic network that emissary satellite, GPS uses. The global location system that the satellitic navigation that moving on the world at present locates the system has the United States (the G23N4SS of GPS) and Russia, both is offerred army code and civilian code two kinds of signal, basically use at opportunity for combat to reach fight the navigation fixed position of army, accurate control and guide and the utility such as rescuing service, with first time bay warlike photograph is compared, the proportion that GPS control and guide holds accurate control and guide already by 10% 90% what heighten this thalassic battle, and compare with photograph of laser control and guide, GPS control and guide has precision taller, do not suffer interference of element of bound of climate condition substandard to wait for an advantage. But what at present GPS opens beautiful, Russia is civilian code merely, if do not develop system of native satellitic navigation location as soon as possible, certainly will is in prospective war person of be enslaved to be enslaved to, be in the situation that passivity takes a beating, our country also begins to develop satellite of navigation fixed position in recent years is this kind of aspect is altered in effort. The attitude control on the satellite is very significant, must the vacuum that exceeds nicety does not have lubricant bearing, precision of geometry of its aperture axis is bicron class, exterior surface roughness is accept rice class, must use exceed accurate grinding and abrade ability to achieve. In addition the emissary satellite that uses to investigating, must equip advanced optics hopes system of far system, high resolution pickup, tall sensitivity is infra-red into wait like the system, this among them high accuracy blame is the grating in TV of spherical lens, high resolution, infra-red into the tellurium cadmium that resemble mercuric semiconductor component must use superprecision technique talent to make. Also ask to have interference rejection, reaction to wait for a characteristic quickly in GPS system, also cannot leave arsenic to change the circuit of large scale integration that gallium semiconductor makes likewise. 1.

The development current that system of weapon of miniature of 5 for military use is future is small small-sized weapon is 20 centuries the new idea weapon that the advanced industry country such as 90 time United States begins to develop, it not only in fundamental theory, design, make waiting for a respect with metric test technology is revolutionary innovation, and will bring to the mode of 21 centuries war change sexual influence. The connotation of the technology of small small-sized weapon that is based on development of technology of system of cable of rice of micron, accept, personal computer to rise is: According to small small-sized weapon special function is mixed characteristic, system of cable of applied personal computer (the advanced technique such as MEMS) , computer, perception, control, pass interface of soft, hardware, integrated collect makes the technology of smooth Electromechanical unifinication of system of small small-sized weapon. The sort of small small-sized weapon basically includes miniature aircraft, small small-sized underwater nobody go implement, system of sensor of technology of robot of small small-sized military, small small-sized scout. Small small-sized weapon has the following and major effect: Small small-sized and unmanned weapon because volume is minor, concealment the gender is good, fast reaction, maneuverability good, viability strong, cost is low characteristic, special apply to city and harsh environment to fall (be like nucleus, unripe, change battlefield to wait) local war. As a result of the development of system of small small-sized weapon, the application of a lot of material that be not silicon and other construction material, rely on a tradition only (model of photoetching attack by surprise, electroform, LIGA) MEMS treatment craft cannot have satisfied a requirement, and the requirement that common and accurate treatment cannot satisfy measure and precision again, can use the characteristic of superprecision technology so, to a few blame silicon construction material undertakes machining, satisfy use requirement. The development train of thought of 2 superprecision technology and the task that face 2.

The development train of thought of 1 superprecision technology to superprecision technology, the biggest demand is industry of national defence military affairs. The superprecision technology of our country and abroad, especially the developed country photograph such as beautiful, Russia is compared, backward more, if why carry excellent and accurate processing technique as soon as possible inside shorter time,the biggest task that face is the requirement with current foundation (incorporate equipment and technology) level, make can get used to applied requirement. Basically include the following fields: The research United States that takes superprecision craft and equipment of special type superprecision seriously, Russia develops train of thought to differ completely on the research of superprecision technology. The United States makes full use of advantage of its science and technology, developed a series of advanced superprecision equipment and exceed accurate testing instrument, use these advanced equipment to machine the part that gives high accuracy. And Russia has very advanced superprecision facility rarely, but the high accuracy spare parts that can machine a place to need likewise, the reason is mastering advanced technology at it. The function index that analyses Russia muller from concerned data for example is not advanced, be inferior to equipment of domestic certain lab even, but they have their distinctive tool clamping apparatus and abrade technology, the precision that machines a spare parts finally and its stability however excel home. So the national condition according to our country, rely on to introduce advanced equipment and instrument blindly can person of be enslaved to be enslaved to, besides a lot of superprecision equipment instruments are contraband. And should rely on to develop all superprecision equipment and instrument by oneself inside certain period not actual also, should take the approach of Russia so, take the research of superprecision craft seriously namely. Home still has at present imported advanced equipment, close the case that cannot process the product that gives qualification nevertheless as a result of craft however, if Nanoform250 was not home of spherical superprecision equipment to introduce,have much station, but because have the technology experience previously,have some institute only and use efficiency and use effect is better. To the treatment of spare parts of a few special requirements, nicety can exceed in what have maturity yuan if the component exceeds the foundation such as slideway of accurate main shaft, high accuracy to go up, use modular technology, manufacture equipment of superprecision of a few special type, can shorten already so development is periodic, can reduce development cost again. Nextpage is paid attention to reduce superprecision technology to study cost, the applied limits of patulous superprecision technology because the treatment facilities with the studies need is clean environment of superprecision technology, strict control, high temperature and detect equipment, all these needs high investment, this restricted its research and application on certain level. Can adopt all sorts of approaches, apply for example modular the technology reduces superprecision equipment to develop cost, the control cost that uses local microenvironment to control a technology to reduce pair of whole environments. On this foundation, can use advanced superprecision technology at certain and civil industry, obtain better economic benefits. On the foundation that grinds beforehand in national defence, strengthen the applied sex and dependability, research our country that answers a gender quickly to be in 85, 95 during, grind beforehand in national defence on obtained a few positive result that have advanced level, but at present these achievement return lab of bureau be confined to, from actual project application still has certain space, perhaps say its machine efficiency and stability to still remain to rise. Continueing to take seriously so while the advanced technique grinds beforehand, more important is the application that enhances positive result, make can serve in time to be mixed at advanced weaponry system other is civil industry. Demand is drawing, the research of powerful powerful combination as a result of superprecision technology is an item that needs high investment, so domestic each unit cannot be battle severally, ought to produce the bibcock effect of national key laboratory adequately, the manpower inside associated industry, material resources raises the superprecision level of our country hard. This is explicit show level, according to the actual condition of our country, the research that has superprecision technology should emphasize be drawing with demand, can strive for larger investment so, just also obtain positive result quickly, apply at weapon type job directly. 2.

The research of the equipment of research job superprecision that 2 superprecision technology is faced with at present and craft passes old effort, the development of domestic superprecision equipment has taken shape, include to be not spherical curved surface compound the index of a lot of equipment that process a system inside has been achieved or approach world advanced level, but still have certain difference from the point of the respect such as the dependability of equipment, maneuverability, how to produce the effect of equipment better, need investment of farther manpower, material resources. For example, the Nanosys-300 of this lab is not spherical curved surface compound treatment facilities in May 2003 after consign user, serve in manufacturing a gleam of all the time, had machined spare parts of job of many batches of type, wait from treatment precision complete can contented user asks for the respect, but from other side, for example the respect such as maneuverability, dependability still has a lot of improvement leeway. Should strengthen the research of superprecision technology reliability, practical technology so. As the development of science and technology, will more and advanced new-style function material and structural material get applied, include material of new-style high strenth, tall hardness, intelligence data, new-style semiconductor material to wait, what should solve above all is its treatment problem. The SiC that uses on satellitic camera for example enhances the machines craft research of composite material, germanium of infra-red material such as, monocrystalline silicon, fluorine changes calcic glass exceed research of accurate turning technology, KDP crystal (laser nuclear fusion) fly the research that cuts treatment craft. Superprecision of complex curved surface and detect the application that the technology studies to be not spherical spare parts is very wide, it can reduce optical system weight, rise to resemble quality, raise systematic dependability. Special dispute axis is not the application of spherical curved surface to becoming, the function that is will whole system more promotes greatly, at present home still cannot machine this kind of curved surface. Large and medium-sized the treatment facilities that is not equipment of superprecision of spherical curved surface and craft to study abroad is at present spherical to be not has been solved partly ban, if Nanoform250 home had imported a few, but facilities of spherical to machining the caliber blame in 300mm above treatment is strict and contraband, but amount of this part part has quite large proportion in certain industry, large blame is spherical in be being developed as soon as possible so equipment of curved surface superprecision has become urgent matter. Equipment of superprecision of spherical to be not curved surface and the research that machine craft had had a few units of domestic that include a laboratory inside certain technology is accumulated, answer to combine force to tackle key problem centrally on this foundation. The development that is not curved surface of axial symmetry optics to machine equipment (center of superprecision of 5 axes CNC) the function that is not curved surface of axial symmetry optics is not spherical curved surface than axial symmetry more advantageous, only at present the United States, Russia can process this kind of product. Although home had many universities and colleges to undertake is not curved surface of axial symmetry optics all sorts of research that machine craft, if use numerical control polish, exceed the method such as accurate turning, but still cannot process a product truly. So home should intensify developing center of superprecision of 5 axes CNC, undertake on this foundation curved surface machines the research of craft is not axial symmetry optics. Be not spherical curved surface to exceed nicety to detect technical research blame is spherical detect the technology is optical blame the crucial problem that spherical treatment should solve above all, be aimed at the national condition of our country especially, returning at present at least can rely on to assist abrade treatment artificially only optical blame is spherical, measure a problem to appear more outstanding. Have the accurate, error that measures the part in giving treatment course quickly only, industry person with ability is possible corresponding and abrade the blame that obtains high accuracy thereby is spherical and optical spare parts. Opposite Yu Fei is spherical for processing technique, its measure technology and foreign photograph to compare backward more. Optical blame is spherical detect the technology ought to have state of face of can rapid in process of lens face treatment judgement error, random feedback gives out to amend a statement further, the cease that should solve a part again examines. Be not the spherical face interference that measuring the method with most application is light-wave to measure a way at present, have taller measurement precision and better dimensional resolution. It can undertake the measurement of whole face quickly, highest resolution can achieve Yanami class. But spherical to different optical blame, must prepare ability of corresponding optical pattern plate to undertake metrical, this surveys a system the structure is very normally complex. Use holographic interference law can be measured blame is spherical, but no matter be to use a level blame is spherical still use the computer to generate (CGH) must make one Zhang Quan news piece, and spherical to the blame of different equation must have corresponding holographic piece. But straight so far home is made holographic piece craft returns a bureau be confined to the craft of a few traditions, spherical to be not those who exceed nicety to measure place to need is holographic piece basically rely on an entrance, this restricted optics to be not the test of spherical spare parts and treatment greatly. At present the entrance is not one piece spherical exceed nicety to measure those who use is holographic piece need more than 10000 U.S. dollors about, and the equation that need tells the other side blame is spherical, to type job this arrives with respect to drag in confidential wait for a problem. Especially to a few grind beforehand or ongoing and the project that did not finalize the design, because drag in arrives the sort with spherical blame and amount are larger, what need funds very considerable, blame of proper motion development is so spherical measure those who use is holographic piece had become urgent matter. Abroad is current the most advanced technology is to use the computer to be generated directly measure blame is spherical with holographic piece (ComputergeneratedHologram) uses laser direct score technology (LaserWritingSystem) is made holographic piece, reduced the cost that make greatly not only, and still shortened the cycle that make. The LaserplotterCLWS300 that the university develops Situjiate stimulates the most typical prototype Germany smooth score system, diameter of laser record drop is 0.

5 μ M, precision of radial coordinate fixed position is 0.

08 μ M(RMS) , precision of horny way fixed position is 0.

1s"(RMS) . System of score of high accuracy laser basically includes the following fields: Optical part: Include laser, acousto-optic overall design reachs system of modulator, automatic focusing and smooth road decorate wait for; machinery part: The; such as platform of slideway of motion of bearing of high accuracy air, high accuracy, vibration isolation is electronic-controlled part: The motion of system of high accuracy machine and fixed position are controlled, the control of laser, modulator and automatic focusing, the share of software of cooperative control; that includes mechanical, optical system at the same time: The control software of mechanical, optical system, computer is generated blame is spherical measure with holographic piece software. The silicon plane technology that the research MEMS processing technique of technology of superprecision of three-dimensional small small-sized part basically has the material that be not silicon to machine the development in craft to rise from semiconductor and body silicon craft. X ray photoetching, electroform is used after 80 time metaphase, reach the LIGA technology that notes model to be born, formed another system that MEMS processes. The accurate LIGA treatment that imperceptible treatment, LIGA machines the silicon that the processing technique of MEMS can include silicon surface treatment and body treatment and uses ultraviolet light to engrave, imperceptible electric spark is machined (figuration of treatment of EDM) , ultrasonic, plasma treatment, laser beam machining, ionic bundle of treatment, electron beam treatment, stereo photoetching. But making the part with these mechanical miniature is various and numerous and complicated is complex, want to make real ground pass a barrier achieves performance of micro computer instrument economic rate, must want to raise the level of the workmanship of spare parts of micro computer instrument and equipment as soon as possible. The technology with the most at present mature workmanship of spare parts of micro computer instrument is photoetching, the gain that spare partses of a lot of classical micro computer instrument make, basically use photoetching or electroform technology to finish. However the micro computer that these mature technique place machine fetterses the spare parts can be planar only (or accurate three-dimensional) , and consumed of actual and true three-dimensional appearance spare parts engraves a technology cannot be finished. In miniature machinery, existing a lot of three-dimensional small parts, the axis of a flight of stairs that each paragraphs of the peg that if miniature mould, diameter is the tiny whorl of 70 μ M, miniature rack, diameter,is 50 μ M, diameter is 200 μ M, 100 μ M, 50 μ M respectively, external diameter is 300 μ M rotate, the treatment of these typical three-dimensional and small parts, do not come true with the technique such as 3 bundles of photoetching, treatment not only, using traditional mechanical production system also is impossible to come true. Accordingly, must be aimed at the characteristic of three-dimensional and small machine, development and development miniature make a system, the treatment that implements small machine part in production system of this kind of new idea, detect and assemble. The makes small small-sized machine system that forms by small small-sized device calls miniature to make a system, among them the treatment that technical difficult problem includes part of small small-sized machine, detect and assemble etc, work to basically be centered in Japan and United States about the research of this respect. Japan advanced the idea of miniature desktop factory above all in this respect. But spare parts of instrument of treatment personal computer must not use miniature to machine a machine tool certainly, the characteristic that machines machine tool of appearance spare parts for example is not his bulk has many small, compare precision with photograph of general accuracy machine tool however taller. So the most crucial index of the machining equipment of small mechanical part is the precision of the machine tool, blindly pursuit reduces besides machine tool bulk can increase cost only. Superprecision technology machines precision as a result of its force of tall, cutting is small wait for a characteristic, suit to have the treatment of small mechanical part particularly, this also machines those who be small mechanical part open up a new approach. The biggest demand of superprecision technology is advanced weaponry system, martial demand is promoting the development of superprecision technology directly. Be aimed at our country at present the development state of affairs of superprecision technology domain, answer to increase the research of pair of superprecision craft and equipment of special type superprecision according to national condition, and the cost that strive reduces superprecision technology, widen the applied domain of superprecision technology. CNC Milling CNC Machining